• 专利标题:   Preparing epitaxial graphene, by putting silicon carbide substrate into deposition chamber of laser chemical vapor deposition equipment, turning on laser to irradiate substrate and adjusting laser power to reduce substrate temperature.
  • 专利号:   CN111017914-A
  • 发明人:   TU R, ZHANG S, ZHANG L
  • 专利权人:   QIXIANG TECHNOLOGY WUHAN CO LTD
  • 国际专利分类:   C01B032/188
  • 专利详细信息:   CN111017914-A 17 Apr 2020 C01B-032/188 202039 Pages: 13 Chinese
  • 申请详细信息:   CN111017914-A CN11222939 03 Dec 2019
  • 优先权号:   CN11222939

▎ 摘  要

NOVELTY - Method for preparing epitaxial graphene by laser heating, involves (a) putting the cleaned silicon carbide substrate into the deposition chamber of the laser chemical vapor deposition equipment, passing high-purity argon gas into the chamber, and adjusting the gas pressure in the chamber to 1000-10000 Pa, (b) turning on the laser to irradiate the silicon carbide substrate, increasing the surface temperature of the substrate to 1500-2000 degrees C at a rate of 400-600 degrees C/second, and continuing to irradiate for 1-5 minutes, and (c) adjusting the laser power to reduce the substrate surface temperature to 600 degrees C at a rate of 100-200 degrees C/second, turning off the laser, stopping the argon flow, turning on the vacuum pump and keeping the vacuum of the chamber at 1-10 Pa, and naturally cooling to room temperature. USE - The method is used for preparing epitaxial graphene. ADVANTAGE - The method rapidly prepares epitaxial graphene with large growth area, high conductivity, controllable number of layers and high crystal quality.