▎ 摘 要
NOVELTY - A pressure sensor (10) has a transistor (TR) equipped with graphene layer (3) as a channel, and a wire (8) containing a piezoelectric material and whose one side is connected on the gate (5) of the transistor. USE - Pressure sensor used for measuring hydraulic pressures and atmospheric pressure. ADVANTAGE - Since the area of wire occupied within pressure sensor compared with piezoelectric thin film is small, the nanowire efficiently detects the pressure of a micro region. The micro variation of induced voltage produced in the nanowire is detectable utilizing the transistor with high selectivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of pressure sensor, which involves forming transistor equipped with graphene layer as channel, on a substrate, and growing wire on the gate of the transistor. DESCRIPTION OF DRAWING(S) - The drawing shows the perspective view of the pressure sensor. Graphene layer (3) Gate (5) Wire (8) Pressure sensor (10) Transistor (TR)