• 专利标题:   Diamond device preparing method, involves removing photoresist cover from diamond electric conduction channel, forming position of drain with photoresist, covering graphene on diamond surface, and depositing ohmic contact metal on graphene.
  • 专利号:   CN103915338-A, CN103915338-B
  • 发明人:   FENG Z, LI J, LIU Q, WANG J, WEI C, HE Z
  • 专利权人:   CHINA ELECTRONICS TECHNOLOGY GROUP CORP, 13TH RES INST CHINA ELECTRONIC SCI TEC
  • 国际专利分类:   H01L021/335
  • 专利详细信息:   CN103915338-A 09 Jul 2014 H01L-021/335 201465 Pages: 9 Chinese
  • 申请详细信息:   CN103915338-A CN10107135 21 Mar 2014
  • 优先权号:   CN10107135

▎ 摘  要

NOVELTY - The method involves forming a diamond table layer (1) with a diamond electric conduction channel (2). A photoresist cover is removed from the diamond electric conduction channel and a source part (6). A position of a drain (7) is formed with the photoresist cover. A graphene (4) is covered on a diamond surface. Ohmic contact metal is deposited on the graphene. The ohmic contact metal are selected from a group consisting of ruthenium, silver, osmium, iridium, platinum, gold, titanium, chromium, germanium, nickel, tungsten, copper, cobalt and iron. USE - Diamond device preparing method. ADVANTAGE - The method enables ensuring simple structure, reducing ohm contact metal resistance of a diamond device and increasing diamond property. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating a diamond device preparing method. Diamond table layer (1) Diamond electric conduction channel (2) Graphene (4) Source part (6) Drain (7)