• 专利标题:   Device for manufacturing graphene, consists of unit for synthesizing graphenes on catalyst metal layer to form graphene structure, unit for attaching carrier film on graphene, unit for inspecting defects in graphene, and etching unit.
  • 专利号:   KR2150702-B1
  • 发明人:   YOON J H, JINHO J, CHAE S
  • 专利权人:   HANWHA AEROSPACE CO LTD
  • 国际专利分类:   C01B032/186, C01B032/194, G01N021/88
  • 专利详细信息:   KR2150702-B1 01 Sep 2020 C01B-032/186 202076 Pages: 13
  • 申请详细信息:   KR2150702-B1 KR165994 12 Dec 2019
  • 优先权号:   KR165994

▎ 摘  要

NOVELTY - A graphene manufacturing device consists of a graphene synthesis unit for synthesizing graphene (A) and graphene (B) on both sides of a catalyst metal layer to form a graphene structure, an attachment unit for attaching a carrier film on the graphene (A), an inspection unit provided adjacent to the attachment unit and spraying an inspection solution on upper surface of the graphene (B) to inspect defects in the graphene (B) and an etching unit for etching the graphene structure passing through the inspection unit. When the quality of the graphene (B) in the inspection unit is confirmed to fall within a preset range, the catalyst metal layer and graphene (B) are removed. The graphene (B) is inspected for defects in the graphene structure synthesized in the graphene synthesis unit, and graphene (A) is transferred when the graphene (B) is removed. USE - Device for manufacturing graphene (claimed). ADVANTAGE - The device enables efficient and economical manufacture of graphene having excellent quality. The unnecessary consumption of graphene can be prevented. The inspection of graphene can be accurately and quickly performed. The test solution can clearly mark the boundaries of graphene, and pattern, size, and defects of graphene can be confirmed accurately. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of graphene.