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  • 专利标题:   Mass spectrometry apparatus for analyzing a semiconductor wafer, includes hybrid provider which provides zinc oxide-graphene hybrid to predetermined region on semiconductor wafer.
  • 专利号:   US2019279856-A1, CN110231393-A, KR2019105715-A, US10825674-B2
  • 发明人:   KIM K J, UM K, YOON C S, LEE K, JIN G, YAN J, YIN Z, LI K, KIMKUKJOO, LEE K T, UM K J
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, UNIV YONSEI IND ACADEMIC COOP FOUND, SAMSUNG ELECTRONICS CO LTD, UNIV YONSEI IND ACADEMIC CORP FOUND, UNIV YONSEI IND ACADEMIC COOP FOUND, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01J049/16, H01L021/67, G01N027/62, H01J049/04, H01L027/146, H01J049/00
  • 专利详细信息:   US2019279856-A1 12 Sep 2019 H01J-049/16 201973 Pages: 19 English
  • 申请详细信息:   US2019279856-A1 US289168 28 Feb 2019
  • 优先权号:   KR026121

▎ 摘　　要

NOVELTY - The mass spectrometry apparatus includes a plate on which a semiconductor wafer comprising an organic matter is disposed. A hybrid provider provides a zinc oxide (ZnO)-graphene hybrid to a predetermined region on the semiconductor wafer. A mass analyzer detects the organic matter in the predetermined region using laser desorption/ionization mass spectrometry. USE - Mass spectrometry apparatus for analyzing a semiconductor wafer. ADVANTAGE - The mass spectrometry apparatus can analyze a contaminant having a relatively low molecular weight remaining on a region of a semiconductor wafer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a mass spectrometry method for analyzing a semiconductor wafer. DESCRIPTION OF DRAWING(S) - The drawing shows TEM images of ZnO, graphene and a ZnO-graphene hybrid. Zinc oxide (132) Graphene (134)