▎ 摘　　要

NOVELTY - The clamp (20) has an electro-adhesive layer (28) comprising conductive compressible material elements coated with an insulating material. The electro-adhesive layer is configured to electrically change adhesion to an object for clamping and unclamping the object, where the material elements include average diameter of 1-100 nm, preferably 5-20 nm, and comprise fiber, foam, nanotube, nanowire, nanorod, nanoporous structure, graphene, or fullerene. USE - Electrostatic clamp e.g. gripper, reticle pod or vacuum pre aligner, for clamping an object e.g. patterning device or substrate, during lithographic patterning. ADVANTAGE - The electroadhesive layer is configured to electrically change adhesion to the object for clamping and unclamping the object, thus operating the clamp at relatively low voltages, which is intrinsically safe for discharges and cycle-induced charges and defect driven local charges. The usage of high-voltage electronics, cables and shielding is avoided. The high e-field is avoided and thus electrical breakdown and treeing through the glass of the clamp is reduced or eliminated. The production speed of the lithographic apparatus is increased. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: an assembly comprising an electrostatic clamp; a semiconductor manufacturing apparatus; a lithographic apparatus for projecting a pattern from a patterning device onto a substrate; and a method for operating an electrostatic clamp for clamping an object. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the electrostatic clamp. 20Electrostatic clamp 22Body 26Burls 28Electro-adhesive layer 30Voltage supply