▎ 摘　　要

NOVELTY - The chip has an isolation layer formed on a surface of a substrate. A graphite isolating layer is formed on a graphene resistor. An end of the graphene resistor is provided with a metal electrode. The substrate surface is provided with a cavity structure. The substrate is made of silicon or glass. An insulating layer is made of silicon dioxide or silicon nitride. A metal adhesion layer is made of titanium, nickel or chromium. The metal electrode is made of gold or aluminum. The graphene resistor is located below the isolating layer. USE - Flow rate sensor chip. ADVANTAGE - The chip has small volume, simple structure, low power consumption and low manufacturing cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a flow rate sensor chip preparation method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a flow rate sensor chip.