• 专利标题:   Graphene acoustic surface wave (SAW) filter device for use in communication and sensing field, has piezoelectric substrate, catalytic metal electrode layer and graphene layer orderly arranged from bottom to top.
  • 专利号:   CN114094982-A
  • 发明人:   ZHANG Q, PENG J, HU J, LI P, GUO Y, HU Y, PAN M, QIU W
  • 专利权人:   UNIV NAT DEFENSE TECHNOLOGY
  • 国际专利分类:   C01B032/186, H03H003/10, H03H009/64
  • 专利详细信息:   CN114094982-A 25 Feb 2022 H03H-009/64 202230 Chinese
  • 申请详细信息:   CN114094982-A CN11417968 25 Nov 2021
  • 优先权号:   CN11417968

▎ 摘  要

NOVELTY - The device has a piezoelectric substrate (1), a catalytic metal electrode layer (2) and a graphene layer (3) orderly arranged from bottom to top. The graphene layer and the catalytic metal electrode layer form a graphene interdigital electrode. The catalytic metal electrode layer is prepared by using transition metal with catalytic cracking carbon source function as raw material. The transition metal comprises one of iron, cobalt, nickel and copper. The thickness of the catalytic metal electrode layer is less than or equal to 10 nm. The piezoelectric substrate is made of lithium niobate, lithium tantalate or III-V group compound piezoelectric material. USE - Graphene acoustic surface wave (SAW) filter device for use in communication and sensing field. ADVANTAGE - The graphene interdigital electrode and the piezoelectric substrate provide stronger bonding force. The quality of the graphene and the performance of the acoustic surface wave filter device are improved. The thickness of the catalytic metal electrode layer and the graphene growth temperature are reduced. The electrode thickness is thinner, the quality is lighter, the filter frequency is made higher, and the quality factor Q value is larger. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of graphene acoustic surface wave filter device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a graphene acoustic surface wave filter device. Piezoelectric substrate (1) Catalytic metal electrode layer (2) Graphene layer (3) Sound surface wave generator (4) Acoustic surface wave receiver (5)