▎ 摘　　要

NOVELTY - The assembly has a flexible perforated membrane (14) with a perimeter and first and second sides, where the flexible perforated membrane includes an array of micro holes. A flexible piezo-effect membrane is adhered to one of the first and second sides of the flexible perforated membrane for covering array of micro holes. An electrical connection unit on the piezo-effect membrane is adapted for communication of piezo effect changes in the piezo-effect membrane for use such that piezo-effect measurements of the piezo-effect membrane is obtained from flexing of the piezo-effect membrane generally and from local deformation of the piezo-effect membrane at each micro hole for providing increased sensitivity for the membrane assembly, where he flexible perforated membrane comprises silicon nitride, silicon dioxide, silicon oxynitride, poly-silicon, silicon, silicon carbide, polymer and elastomer. The piezo effect membrane comprises graphene, silicon, polysilicon and molybdenum disulfide. USE - Membrane assembly for a piezo effect based force sensing apparatus (claimed) for making a highly sensitive MEMS-based pressure sensor. ADVANTAGE - The assembly realizes increased gauge factor than without microdrums, thus allowing improved pressure sensitivity of the sensor. The assembly allows the piezoresistive or piezoelectric changes of the piezo-effect layer based on strain caused by differential pressure at the measurement space to be transduced through the electrodes and translated into pressure values, so that the pressure read-outs can be applied in a variety of contexts and ways. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) an apparatus for force sensing based on piezo effect; (2) a system for high sensitivity pressure sensing. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a membrane assembly for a piezo effect based force sensing apparatus for making a highly sensitive MEMS-based pressure sensor. 10Pressure Sensor 14Flexible perforated membrane 18Electrodes 18AMetal contacts 20Measuring space