• 专利标题:   Preparation of nitrogen-doped graphene, involves providing multilayer film substrate containing silicon layer and nickel layer, performing nitrogen ion implantation on surface of nickel layer, and annealing nitrogen-doped substrate.
  • 专利号:   CN108364856-A
  • 发明人:   ZHAO Z, ZHAO Y, FU E, WANG X, HAN D
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   H01L021/02, H01L021/265, H01L021/324
  • 专利详细信息:   CN108364856-A 03 Aug 2018 H01L-021/02 201857 Pages: 14 Chinese
  • 申请详细信息:   CN108364856-A CN10162045 27 Feb 2018
  • 优先权号:   CN10162045

▎ 摘  要

NOVELTY - The method for preparing nitrogen-doped graphene, involves (1) providing a multilayer film substrate comprising silicon layer, silicon dioxide layer, amorphous silicon carbide layer, copper layer and nickel layer arranged sequentially, (2) performing nitrogen ion implantation on the surface of the nickel layer of the multilayer film substrate to obtain nitrogen-doped substrate, (3) annealing the nitrogen-doped substrate to obtain nitrogen-doped graphene. The amorphous silicon carbide layer is replaced with diamond-like carbon film. USE - Method for preparing nitrogen-doped graphene. ADVANTAGE - The method enables preparation of nitrogen-doped graphene with controlled doping amount of nitrogen atoms by controlling the ion implantation parameters, and provides nitrogen-doped graphene with electron mobility of 850 cm2.V-1.second-1.