• 专利标题:   Preparation of graphene on silicon carbide substrate by placing silicon carbide wafer in quartz tube, inletting mixed gas of argon gas and chlorine, reacting silicon carbide and chlorine, placing carbon film on copper film, and annealing.
  • 专利号:   CN102659094-A
  • 发明人:   DENG P, GUO H, LEI T, ZHANG Y, ZHANG K
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN102659094-A 12 Sep 2012 C01B-031/04 201323 Pages: 6 Chinese
  • 申请详细信息:   CN102659094-A CN10009957 03 Jan 2012
  • 优先权号:   CN10009957

▎ 摘  要

NOVELTY - Preparation of graphene on silicon carbide (SiC) substrate based on copper (Cu) film annealing and chlorine (Cl2) reaction comprises carrying out standard cleaning to SiC wafer; placing the cleaned SiC wafer in quartz tube; inletting mixed gas of argon (Ar) gas and Cl2 to quartz tube and reacting SiC and Cl2 at 700-1100 degrees C for 4-10 minutes; generating carbon film; placing the carbon surface of carbon film on Cu film; putting in Ar gas; annealing for 15-25 minutes at 900-1200 degrees C to generate graphene; and taking Cu film from the graphene sheet. USE - Preparation of graphene on SiC substrate (claimed) used for sealing gas and liquid. ADVANTAGE - The method has simple technique, high safety, and good continuity; provides smooth surface; and achieves low porosity.