▎ 摘 要
NOVELTY - The apparatus (1) has a tension control unit (40) for depositing graphene while transferring the catalyst metal film in a roll-to-roll method. The upper chamber (10) includes a supply roller (50) for supplying a catalyst metal film to a deposition chamber. An upper direction switching roller for converting a direction of the catalyst metal film is supplied from the supply roller in a downward direction. A deposition chamber (20) is connected to a lower portion of the upper chamber to deposit graphene on the catalytic metal film. A lower direction switching roller converts the direction of the catalyst metal film transferred from the deposition chamber. The tension control roller changes a direction while applying a predetermined tension to the catalyst metal film transferred from the lower direction switching roller. The lower chamber (30) includes a winding roller to which the catalytic metal film transferred from the tension adjusting roller is wound. USE - Apparatus for manufacturing one-way roll-to-roll graphene film used in transparent display or flexible display. ADVANTAGE - The damage to the catalytic metal film on which graphene is deposited which is prevented by providing a tension control unit so that a constant tension is maintained in the catalytic metal film. The productivity is increased since heat inside the deposition chamber is quickly cooled through the cooling tube of the deposition chamber. The damage to the catalyst metal film in advance is prevented since a tension adjusting unit is provided in the lower chamber and the tension acting on the catalyst metal film is accurately determined by the sensor. The scratches are prevented by the roller because one surface of the graphene deposited on the catalytic metal film does not come in contact with the roller, so that the high-quality graphene is obtained. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the roll to roll graphene film manufacturing apparatus in which the tension control unit is equipped in the lower unit. Apparatus for manufacturing one-way roll-to-roll graphene film (1) Upper chamber (10) Deposition chamber (20) Lower chamber (30) Tension control unit (40) Supply roller (50)