• 专利标题:   Method for fabricating graphene for use in e.g. transparent substrate of e.g. photovoltaic device, involves transferring graphene film to device substrate, doping graphene film with gold trichloride, and patterning graphene film.
  • 专利号:   US2017057827-A1
  • 发明人:   SULTANA M, LI M J, HESS L A
  • 专利权人:   NASA US NAT AERO SPACE ADMIN
  • 国际专利分类:   C23C016/455, C23C016/50, G02B026/04, H01L021/02, H01L021/285, H01L021/3215, H01L029/49, H01L031/0224, H01L031/18
  • 专利详细信息:   US2017057827-A1 02 Mar 2017 201719 Pages: 15 English
  • 申请详细信息:   US2017057827-A1 US843125 02 Sep 2015
  • 优先权号:   US843125

▎ 摘  要

NOVELTY - The method involves growing a graphene film on a copper substrate using chemical vapor deposition (CVD). The graphene film is transferred from the copper substrate to a device substrate. The graphene film is doped with gold trichloride. The graphene film is patterned. The copper substrate is heated in a CVD reactor at a temperature of about 850 degrees C-1000 degrees C under an ambient pressure of hydrogen, or argon. USE - Method for fabricating graphene for use in device e.g. transparent substrate of photovoltaic device and FET (all claimed). ADVANTAGE - The microshutter array is programmed to admit light from the ensemble of selected objects, such that the capability of simultaneous observation of large number of objects is provided. The graphene electrodes on the glass substrate are used in actuation mechanism of the microshutter array cells with high transmittance and low resistance. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a graphene film; and (2) a transparent substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the process for transferring the graphene film from the copper substrate to the device substrate.