▎ 摘　　要

NOVELTY - Immersion spray etching comprises covering the side of the graphene-grown substrate with the graphene film that needs to be retained with a protective film, adding to the flowing etching solution to etch the substrate to form a protective film/graphene. USE - The method is useful for immersion spray etching. ADVANTAGE - The method and device can balance the etching rate of the substrate and ensure the uniformity and yield of the graphene square resistance. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) transferring graphene films, comprising using the immersion spray etching method and bonding the protective film/graphene graphene surface to the target substrate, removing the protective film, completing the transfer of a layer of graphene film; and (2) immersion spray etching device.