▎ 摘　　要

NOVELTY - The sensor has a graphene plasma excimer sensing unit connected with an infrared lens. The graphene plasma excimer sensing unit is provided with a doped silicon substrate. Two ends of the doped silicon substrate are provided with a first grating coupling region and a second grating coupling region. The infrared lens emits infrared broadband light source. A biological sample is placed on an optical micro-cavity structured sensing zone. The infrared lens is provided with a Fourier infrared spectrometer to analyze spectral measurement. USE - Infrared graphene plasma excimer biochemical sensor. ADVANTAGE - The sensor improves biomolecule detection flexibility in an effective manner. DESCRIPTION OF DRAWING(S) - The drawing shows a partial sectional view of an infrared graphene plasma excimer biochemical sensor.