• 专利标题:   Selectively growing graphene by spontaneous pattern transferring, comprises forming a catalyst layer with a catalyst mask pattern on a substrate, forming a metal layer on catalyst layer, and growing graphene by transferring mask pattern.
  • 专利号:   KR2016042368-A
  • 发明人:   CHIN K K, SANG H L, MI Y J
  • 专利权人:   UNIV KYUNGHEE IND COOP
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   KR2016042368-A 19 Apr 2016 C01B-031/04 201631 Pages: 28 English
  • 申请详细信息:   KR2016042368-A KR140506 17 Oct 2014
  • 优先权号:   KR135954

▎ 摘  要

NOVELTY - Selectively growing graphene by spontaneous pattern transferring, comprises (a) forming a catalyst layer having a catalyst mask pattern on a substrate, (b) forming a metal layer on the catalyst layer for growing graphene, and (c) growing graphene by transferring the catalyst mask pattern on the metal layer spontaneously, and reacting by providing heat and reaction gas containing carbon source to a thin metal film. USE - The method is useful for selectively growing graphene by spontaneous pattern transferring (claimed). ADVANTAGE - The method prevents exposure to residual organic material, and reduction in inherent properties. DETAILED DESCRIPTION - Selectively growing graphene by spontaneous pattern transferring, comprises either: (a) forming a catalyst layer (120) having a catalyst mask pattern on a substrate (110), (b) forming a metal layer on the catalyst layer for growing graphene, and (c) growing graphene by transferring the catalyst mask pattern on the metal layer spontaneously, and reacting by providing heat and reaction gas containing carbon source to a thin metal film (130); or (a1) providing an atomic species layer having a mask pattern on the substrate, (b1) forming the catalyst layer on the provided atomic species layer, (c1) forming the metal layer on the catalyst layer, and (d1) growing graphene by transferring the mask pattern on the metal layer spontaneously, and reacting by providing heat and reaction gas containing carbon source to the thin metal film. An INDEPENDENT CLAIM is also included for selectively grown graphene produced by the above method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of selectively growing graphene. Substrate (110) Catalyst layer (120) Thin metal film (130)