• 专利标题:   Chemical vapor deposition system for graphene growth comprises tubular quartz reactor, tubular furnace moving along axis of reactor using substrate.
  • 专利号:   RU2704691-C1
  • 发明人:   ARKHIPOV V E, GUSELNIKOV A V, POPOV K M, BULUSHEVA L G, OKOTRUB A V
  • 专利权人:   KARSI LLC
  • 国际专利分类:   C23C016/26
  • 专利详细信息:   RU2704691-C1 30 Oct 2019 C23C-016/26 201994 Pages: 1 Russian
  • 申请详细信息:   RU2704691-C1 RU142222 18 Jul 2018
  • 优先权号:   RU142222

▎ 摘  要

NOVELTY - Invention relates to CVD chemical vapor deposition and can be used for synthesis of carbon nanomaterials, such as graphene films, multilayer graphene, carbon nanotubes. System for chemical vapor deposition for growth of graphene comprises a tubular quartz reactor, a tubular furnace moving along the axis of the reactor using a substrate, a substrate holder, a gas inlet and adjustment system, a temperature control unit and an evacuation system. Quartz reactor and tubular furnace are installed on extending platform, both ends of reactor are connected to buffer reservoir, wherein one end of the reactor is connected to the buffer tank in series through the connector and through the compartments of the forced circulation of the gas stream. Connecting socket is equipped with substrate holder with built-in thermocouple. In particular cases of the invention implementation, the connector is installed stationary, and one of the reactor ends is made in the form of a capillary. USE - Chemistry. ADVANTAGE - Enabling implementation of a closed loop with forced circulation of gas, which reduces consumption of gases required for growth of graphene and other carbon nanomaterials, as well as reduced time of operation of the filling system and rotary pump, as well as simplified process of deposition. 3 cl, 1 dwg, 2 ex