• 专利标题:   Method for preparing thermal sound producing device of thermophone, involves fixing array unit with cone structure, performing oxygen plasma etching process to remove etching mask layer, and forming graphene layer on base structure layer.
  • 专利号:   CN106612486-A, CN106612486-B
  • 发明人:   CHEN Y, REN T, YANG Y
  • 专利权人:   UNIV TSINGHUA, UNIV TSINGHUA
  • 国际专利分类:   H04R023/00, H04R031/00
  • 专利详细信息:   CN106612486-A 03 May 2017 H04R-023/00 201733 Pages: 12 Chinese
  • 申请详细信息:   CN106612486-A CN10705537 27 Oct 2015
  • 优先权号:   CN10705537

▎ 摘  要

NOVELTY - The method involves forming a substrate with a photoresist layer by a lithographic exposure. An etching mask layer is formed on the substrate, where the etching mask layer comprises a photoetching glue column body that is arranged in an array unit. Isotropic etching process is performed, where a base structure layer is formed between the etching mask layer and the substrate. The array unit is fixed with a cone structure. Oxygen plasma etching process is performed to remove the etching mask layer. A graphene layer is formed on the base structure layer. USE - Method for preparing a thermal sound producing device of a thermophone (claimed). ADVANTAGE - The method enables increasing producing efficiency and sound intensity rate. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for preparing a thermal sound producing device of a thermophone. '(Drawing includes non-English language text)'