• 专利标题:   ROLL-TYPE CVD REACTOR FOR SYNTHESISING GRAPHENE COATINGS ON SUBSTRATES IN THE FORM OF A WIDE STRIP.
  • 专利号:   RU2760676-C1
  • 发明人:   SMOVZH D V, MATOCHKIN P E, BEZRUKOV I A, KRIVENKO A S
  • 专利权人:   AS SIBE THERMOPHYSICS SCI INST, EPOSENG LLC
  • 国际专利分类:   C01B032/182
  • 专利详细信息:   RU2760676-C1 29 Nov 2021 C01B-032/182 202104 Pages: 0 Russian
  • 申请详细信息:   RU2760676-C1 RU141857 18 Dec 2020
  • 优先权号:   RU141857

▎ 摘  要

NOVELTY - Invention relates to a class of roll reactors for chemical deposition from the gas phase of thin graphene films. Claimed is a roll-type CVD reactor including a vacuum working chamber divided into three chambers (a central chamber with heat-insulated heating areas and side chambers with rollers for moving the substrate through the heating area, a substrate tensioning unit, and a drive), a system of heat controllers, a system for moving the substrate, a gas supply system, and a vacuum pumping system. A characteristic feature of the reactor is the fact that the heat-insulated heating area and the system for moving the strip substrate are located inside the vacuum chamber, thus preventing the contact of the metal substrate with the graphene layer applied thereon with the atmosphere until complete cooling. USE - Coatings. ADVANTAGE - Invention ensures creation of a compact apparatus for synthesising high-quality coatings on substrates in the form of a wide strip with lower requirements for heat insulation and vacuum pumping. 4 cl, 2 dwg, 1 ex