• 专利标题:   Graphene oxide-based flexible charge trap memory has charge trap layer which is made of graphene oxide and is provided on upper surface of charge tunneling layer.
  • 专利号:   CN103489870-A
  • 发明人:   WANG P, ZHOU P, ZHANG W, SUN Q, WANG L
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   H01L027/115, H01L029/12, H01L029/51, H01L029/792
  • 专利详细信息:   CN103489870-A 01 Jan 2014 H01L-027/115 201418 Pages: 7 Chinese
  • 申请详细信息:   CN103489870-A CN10449103 28 Sep 2013
  • 优先权号:   CN10449103

▎ 摘  要

NOVELTY - The charge trap memory has a three-layer structure which is provided with a substrate (101) which is made of flexible material. A charge tunneling layer (104) is provided on the substrate. A charge trap layer (105) made of graphene oxide is provided on the upper surface of charge tunneling layer. A control gate dielectric blocking layer (106) is formed on the upper surface of the charge trap layer. USE - Graphene oxide-based flexible charge trap memory. ADVANTAGE - The low temperature atomic layer deposition technology is used and the spin coating of graphene oxide at room temperature is performed. The process thermal budget can be reduced. The practical and reliable charge trap memory can be achieved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of graphene oxide-based flexible charge trap memory. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the graphene oxide-based flexible charge trap memory. Substrate (101) Charge tunneling layer (104) Charge trap layer (105) Control gate dielectric blocking layer (106) Gate electrode (107)