• 专利标题:   Femtosecond laser-based graphene oxide surface pattern processing system comprises femtosecond laser adjusts the laser power through the attenuator, and adjust the femtosecond laser spot diameter through the pupil.
  • 专利号:   CN110193662-A, CN110193662-B
  • 发明人:   JIANG L, GUO H, YAN J
  • 专利权人:   UNIV TSINGHUA, BEIJING INST TECHNOLOGY
  • 国际专利分类:   B23K026/046, B23K026/064, B23K026/36, B23K026/402
  • 专利详细信息:   CN110193662-A 03 Sep 2019 B23K-026/064 201976 Pages: 10 Chinese
  • 申请详细信息:   CN110193662-A CN10300082 15 Apr 2019
  • 优先权号:   CN10300082

▎ 摘  要

NOVELTY - Femtosecond laser-based graphene oxide surface pattern processing system comprises femtosecond laser, an attenuator, an aperture, an electronically controlled shutter, a mirror, a spatial light modulator, first convex lens, second convex lens, dichroic mirror, focusing objective lens, translation stage, third convex lens, loaded coupled device and computer. The femtosecond laser includes attenuator, aperture, and electronically controlled shutter common optical axis setting. The femtosecond laser generated by the femtosecond laser adjusts the laser power through the attenuator, adjusting the femtosecond laser spot diameter through the pupil. Electrically controlled shutter and mirror are incident on the surface of the spatial light modulator. The reflected femtosecond laser sequentially passes through the first convex lens and the second convex lens, and then sequentially enters the dichroic mirror and the focusing objective lens. USE - Used as femtosecond laser-based graphene oxide surface pattern processing system. ADVANTAGE - The system: has high processing efficiency, high repeatability and wide adaptability. DETAILED DESCRIPTION - Femtosecond laser-based graphene oxide surface pattern processing system comprises femtosecond laser, an attenuator, an aperture, an electronically controlled shutter, a mirror, a spatial light modulator, first convex lens, second convex lens, dichroic mirror, focusing objective lens, translation stage, third convex lens, loaded coupled device and computer. The femtosecond laser includes attenuator, aperture, and electronically controlled shutter common optical axis setting. The femtosecond laser generated by the femtosecond laser adjusts the laser power through the attenuator, adjusting the femtosecond laser spot diameter through the pupil. Electrically controlled shutter and mirror are incident on the surface of the spatial light modulator. Lasers that are illuminated at different locations on the surface of the modulator are loaded with different phases and then reflected. The reflected femtosecond laser sequentially passes through the first convex lens and the second convex lens, and then sequentially enters the dichroic mirror and the focusing objective lens. Spread and focus on the surface of the graphene oxide sample, and realizing the processing of the surface pattern of graphene oxide. The graphene oxide sample is placed on the translation stage. The other side of the dichroic mirror is an observation system consisting of a third convex lens and a loaded coupled element to realize observation during processing. The femtosecond laser, electronically controlled shutter, spatial light modulator. The translation stage and the loaded coupled component are connected to the computer via signal lines.