• 专利标题:   Diffusion barrier comprises three layers namely insulating substrate, graphene layer, and copper-graphene conductive layer where graphene layer is provided between insulating substrate and copper-graphene conductive layer.
  • 专利号:   CN103956354-A
  • 发明人:   LUO J, REN Z, XU Y, YU B
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   C25D015/00, H01L021/768, H01L023/538
  • 专利详细信息:   CN103956354-A 30 Jul 2014 H01L-023/538 201468 Pages: 7 Chinese
  • 申请详细信息:   CN103956354-A CN10194159 09 May 2014
  • 优先权号:   CN10194159

▎ 摘  要

NOVELTY - Diffusion barrier comprises three layers namely insulating substrate (1), graphene layer (2), and copper-graphene conductive layer (3). The graphene layer is provided between the insulating substrate and copper-graphene conductive layer. USE - Diffusion barrier. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing a diffusion barrier, which involves: (A) rinsing insulating substrate with deionized water and acetone in an ultrasonic cleaning device; (B) transferring the graphene into the processing substrate; (C) dissolving copper sulfate in water and adding sulfuric acid hydrochloric acid uniformly to obtain copper plating solution; (D) sonicating the prepared graphene sheet in prepared copper plating solution; and (E) drying the obtained sheet at 10-40 degrees C at 0.5-16A/dm for 1-10 minutes to obtain desired product. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a diffusion barrier. Insulating substrate (1) Graphene layer (2) Copper-graphene conductive layer (3)