• 专利标题:   Gallium nitride-based graphene TES superconducting device, has gallium nitride substrate layer whose upper side is fixed with graphene layer, where upper side of graphene layer is fixed with superconducting thin film layer.
  • 专利号:   CN108899410-A
  • 发明人:   HU H
  • 专利权人:   JIANGSU XINCI SUPERCONDUCTOR CO LTD
  • 国际专利分类:   H01L039/12, H01L039/24, G01J005/20
  • 专利详细信息:   CN108899410-A 27 Nov 2018 H01L-039/12 201902 Pages: 7 Chinese
  • 申请详细信息:   CN108899410-A CN10733469 06 Jul 2018
  • 优先权号:   CN10733469

▎ 摘  要

NOVELTY - The device has a gallium nitride substrate layer whose upper side is fixed with a graphene layer. An upper side of the graphene layer is fixed with a superconducting thin film layer. A titanium film layer is fixed between the graphene layer and the superconducting thin film layer. The superconducting thin film layer is provided with a lower side electronic superconducting thin film layer and an upper side electronic superconductive film layer, where the lower side electronic superconducting thin film layer is made up of gold or palladium material. USE - Gallium nitride-based graphene TES superconducting device. ADVANTAGE - The device is simple to process, and obtains higher thermal coupling coefficient, and reduces recovering time, and increases response speed, and determines heat radiation rate of a phonon coupling material. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a gallium nitride-base graphene TES superconducting device manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a gallium nitride-based graphene TES superconducting device manufacturing. '(Drawing includes non-English language text)'