• 专利标题:   Mechanical hand for film continuous graphene film continuous scale deposition device, has screw rod whose end is installed on driving device, and push rod slidably mounted on screw rod along length direction of screw rod.
  • 专利号:   CN218026334-U
  • 发明人:   XIE S
  • 专利权人:   BEIJING TECHNOL SCI CO LTD
  • 国际专利分类:   B25J011/00, B25J009/12, C23C016/26, C23C016/54
  • 专利详细信息:   CN218026334-U 13 Dec 2022 C23C-016/54 202204 Chinese
  • 申请详细信息:   CN218026334-U CN23197176 18 Dec 2021
  • 优先权号:   CN23197176

▎ 摘  要

NOVELTY - The application model relates to a mechanical arm and graphene film continuous scale deposition device, comprising a sample sequentially, a deposition chamber, a cooling chamber and a mechanical hand; the mechanical arm comprises a driving device, a screw rod and a push rod; one end of the screw rod is installed on the driving device, the other end is horizontally extended, the push rod is slidably mounted on the screw rod along the length direction of the screw rod; the sample feeding chamber is provided with a trolley, the mechanical hand pushes the trolley from the sample feeding chamber to the cooling chamber. The application model has the effect of protecting the service life of the deposition chamber from being damaged, and saving energy. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a mechanical arm and graphene film continuous scale deposition device.