• 专利标题:   Thin film transistor preparation method, involves forming grid electrode by graphene, forming first oxidation graphene material layer in grid electrode, and forming second oxidation graphene material layer in grate insulation layer.
  • 专利号:   CN105304495-A, WO2017049887-A1, US2017294516-A1, US10141409-B2
  • 发明人:   ZHANG D, DONG W, HOU D
  • 专利权人:   BOE TECHNOLOGY GROUP CO LTD, BOE TECHNOLOGY GROUP CO LTD
  • 国际专利分类:   H01L021/28, H01L021/336, H01L021/34, H01L021/44, H01L027/12, H01L029/43, H01L029/49, H01L029/51, H01L029/786, H01L029/16, H01L029/45, H01L029/66, H01L021/04, H01L029/778
  • 专利详细信息:   CN105304495-A 03 Feb 2016 H01L-021/336 201616 Pages: 16 English
  • 申请详细信息:   CN105304495-A CN10604545 21 Sep 2015
  • 优先权号:   CN10604545

▎ 摘  要

NOVELTY - The method involves forming a grid electrode by an oxidation graphene. A grate insulation layer is formed in the oxidation graphene, which is composed with a source electrode and a drain electrode. A source rod is fixed with the drain electrode. A grid electrode is formed in the oxidation graphene, which is doped with a graphene active area for forming the oxidation graphene. A first oxidation graphene material layer is formed in the grid electrode. A second oxidation graphene material layer is formed in the grate insulation layer. USE - Thin film transistor preparation method. ADVANTAGE - The method enables avoiding performance problem of a thin film transistor. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a thin film transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a thin film transistor.