• 专利标题:   Micro-sheet transfer device, has contact for transferring micro-sheet, and probe for driving contact to adjust pose, where probe is offset with contact and probe is fixedly connected or integrally formed with contact.
  • 专利号:   CN115339874-A
  • 发明人:   ZHENG Q, NIE J, YANG D
  • 专利权人:   UNIV TSINGHUA, UNIV TSINGHUA RES INST IN SHENZHEN
  • 国际专利分类:   B65G047/74, B65G047/90
  • 专利详细信息:   CN115339874-A 15 Nov 2022 B65G-047/74 202299 Chinese
  • 申请详细信息:   CN115339874-A CN11111144 13 Sep 2022
  • 优先权号:   CN11111144

▎ 摘  要

NOVELTY - The device comprises a contact (1) for transferring a micro-sheet, where the contact is made of transparent material. A probe (3) is used for driving the contact to adjust a pose. The probe is offset with the contact, and the probe is fixedly connected or integrally formed with contact. The contact is provided with a first contact plate and a second contact plate. USE - Micro-sheet transferring device for transferring super-sliding sheets in a semiconductor device manufacturing industry and energy, environment and health directly related. Uses include but are not limited to graphene molybdenum disulfide and two-dimensional material surface. ADVANTAGE - The micro sheet transfer device can provide favorable conditions operating personnel the use of the microscope from the upper side, so as to improve the precision of the micro-sheet transfer operation. The contact is driven to adjust the pose according to the observation result, so that the micro sheet can be observed from above operating personnel using the microscope. The precision of miniature sheet transfer operation can be improved. The number of the miniature sheet and the adhered micro sheet is adhered on the sticky portion can be convenient to operating personnel. The micro sheets to be transferred on the contact can be transferred to the target substrate by using the Van der Waals force to place the miniature sheets on the surface of the contact. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a micro-sheet transfer method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the micro-sheet transfer device. 1Contact 2Connecting piece 3Probe 4Telescopic rod 5Control member 6Hinge 10Substrate 20Microscope 21Main body part 22Connecting part