• 专利标题:   Manufacture of graphene involves soaking silicon carbide wafer in mixed solution of hydrogen sulfide and hydrogen peroxide, soaking silicon carbide wafer in hydrofluoric acid solution, drying, irradiating laser on silicon carbide.
  • 专利号:   CN102502613-A, CN102502613-B
  • 发明人:   CHEN X, JI L, JIANG Y, LI Q, WU Y, ZENG Y
  • 专利权人:   UNIV BEIJING TECHNOLOGY
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN102502613-A 20 Jun 2012 C01B-031/04 201309 Pages: 8 Chinese
  • 申请详细信息:   CN102502613-A CN10382636 25 Nov 2011
  • 优先权号:   CN10382636

▎ 摘  要

NOVELTY - Silicon carbide wafer is soaked in an organic solvent and ultrasonically-washed for 6-10 minutes. The resultant product is soaked in a mixed solution of hydrogen sulfide and hydrogen peroxide in molar ratio of 1:1-1:4 for 6-10 minutes and washed. The silicon carbide wafer is further soaked in 5-20% hydrofluoric acid solution for 6-10 minutes, and washed. The resultant product is dried. The dried silicon carbide sample is placed on a target table and laser having wavelength of 308-532 nm is irradiated on the silicon carbide sample, to obtain graphene. USE - Manufacture of graphene. ADVANTAGE - The method provides graphene with improved surface resistance and electroconductivity. DETAILED DESCRIPTION - Silicon carbide wafer is soaked in an organic solvent and ultrasonically-washed for 6-10 minutes. The resultant product is soaked in a mixed solution of hydrogen sulfide and hydrogen peroxide in molar ratio of 1:1-1:4 for 6-10 minutes and washed. The silicon carbide wafer is further soaked in 5-20% hydrofluoric acid solution for 6-10 minutes and washed. The resultant product is dried. The dried silicon carbide sample is placed on a target table and laser having wavelength of 308-532 nm is irradiated on the silicon carbide sample with monopulse energy density of 1.0-1.33 J/cm2, and frequency of 3-10 Hz, to obtain graphene.