• 专利标题:   Apparatus for aligning position between graphene sheet and mask, has perforate plate formed with multiple pores that are formed on upper side of vacuum unit, where through-hole is formed on alignment pin.
  • 专利号:   KR2013139640-A, KR1388503-B1
  • 发明人:   BAIK W Y
  • 专利权人:   KC TECH CO LTD
  • 国际专利分类:   G02F001/13, H01L021/68
  • 专利详细信息:   KR2013139640-A 23 Dec 2013 G02F-001/13 201406 Pages: 12
  • 申请详细信息:   KR2013139640-A KR063278 13 Jun 2012
  • 优先权号:   KR063278

▎ 摘  要

NOVELTY - The apparatus has a perforate plate (210) formed with multiple pores (211). The pores are formed on an upper side of a vacuum unit (100). A vacuum chamber (120) is formed on a main body (110). An updown cylinder (140) drives an alignment pin (142) that is fixed on a jig plate (200). A first through-hole (220) is formed on the jig plate. A graphene sheet (300) is formed with a second through-hole (320). A mask (400) is formed with a third through-hole (420). The second through-hole is formed on the alignment pin. The graphene sheet and the mask are closely fixed to the alignment pin. USE - Apparatus for aligning position between a graphene sheet and a mask. ADVANTAGE - The graphene sheet and the mask are closely fixed to the alignment pin, so that easily performs alignment position process of the mask and the graphene sheet, controls exhaust volume of a vacuum absorptor and steadily maintains magnetic force acting on alignment of the mask and the graphene sheet. The apparatus raises the alignment pin according to operation of the updown cylinder, so that the mask, the graphene sheet and the jig plate can be separated from each other and quick alignment process of the mask can be made. The apparatus improves productivity of a product, reduces processing time and avoids photoresist coating phenomenon. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for aligning position between a graphene sheet and a mask. DESCRIPTION OF DRAWING(S) - The drawing shows an exploded perspective view of an apparatus for aligning position between a graphene sheet and a mask. Vacuum unit (100) Main body (110) Vacuum chamber (120) Updown cylinder (140) Alignment pin (142) Jig plate (200) Perforate plate (210) Pores (211) Through-holes (220, 320, 420) Graphene sheet (300) Mask (400)