• 专利标题:   Method for forming nucleation of diamond structure e.g. mesh-like structure, on non-diamond substrates, involves forming plasma in reaction chamber to cause carbon-containing gas to react and form diamond nuclei on surface of graphene layer.
  • 专利号:   US2016340777-A1, US10351948-B2
  • 发明人:   TZENG Y, CHANG C
  • 专利权人:   UNIV NAT CHENG KUNG, UNIV NAT CHENG KUNG
  • 国际专利分类:   C23C016/27, H01L021/02, H01L021/285, H01L021/48, H01L023/373, H01L029/16
  • 专利详细信息:   US2016340777-A1 24 Nov 2016 C23C-016/27 201706 Pages: 13 English
  • 申请详细信息:   US2016340777-A1 US158634 19 May 2016
  • 优先权号:   TW116395

▎ 摘  要

NOVELTY - The method involves providing a substrate (1). A graphene layer (2) is formed on a surface of the substrate. A reaction chamber is provided. The substrate is placed in the reaction chamber. A gas mixture is provided in the reaction chamber, where the gas mixture includes carbon-containing gas. Plasma is formed in the reaction chamber to cause the carbon-containing gas to react and form a set of diamond nuclei on a surface of the graphene layer. The substrate is a silicon substrate, a silicon dioxide substrate and a silicon wafer. USE - Method for forming nucleation of a diamond structure e.g. mesh-like structure and sp3 structure, on non-diamond substrates. ADVANTAGE - The method enables improving uneven distribution and penetration of diamond nuclei into groves of substrates formed by use of additional coating layers. The method enables controlling flow of a gas mixture to prevent carbon soots formation from excessive carbon-containing gas in a reaction chamber, thus improving quality of diamond nucleation. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a method for forming nucleation of a diamond structure. Substrate (1) Graphene layer (2) Diamond particles (3) Tungsten layer (5)