▎ 摘　　要

NOVELTY - An electronic device consists of graphene and carbon nanotube. The graphene is formed on the carbon nanotube. The graphene and carbon nanotube are electrically connected through a catalyst metal. USE - Electronic device e.g. metal oxide-Semiconductor field effect transistor. ADVANTAGE - The electronic device having fine structures such as via and wiring with low electrical resistance and ballistic conduction, is manufactured. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of electronic device, involves forming carbon nanotube, and forming catalyst metal on carbon nanotube and graphene on catalyst metal. DESCRIPTION OF DRAWING(S) - The drawing shows schematic sectional view of manufacture of electronic device. Silicon substrate (10) Element separation structure (11) Extension region (16) Inter layer insulation film (21, 31) Wiring structure (30, 40)