• 专利标题:   Method for growing graphene that is utilized in semiconductor device, involves providing single crystal of silicon or germanium substrate, and growing graphene layers on epitaxial layer by chemical vapor deposition.
  • 专利号:   CN105990091-A, CN105990091-B
  • 发明人:   LUO J, ADAMSON H H, WANG L, ZHAO C, WANG G
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI, INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/02, H01L029/06, H01L029/16
  • 专利详细信息:   CN105990091-A 05 Oct 2016 H01L-021/02 201676 Pages: 6 Chinese
  • 申请详细信息:   CN105990091-A CN10048255 29 Jan 2015
  • 优先权号:   CN10048255

▎ 摘  要

NOVELTY - A graphene growing method involves providing a single crystal of silicon or a single crystal of a germanium substrate to form an epitaxial layer of silican-germanium-carbon on the substrate, followed by growing the graphene layers on the epitaxial layer by chemical vapor deposition. USE - Method for growing a graphene that is utilized in a semiconductor device. DETAILED DESCRIPTION - A graphene growing method involves providing a single crystal of silicon or a single crystal of a germanium substrate to form an epitaxial layer of silicon-germanium-carbon (Si1-xGexCy) on the substrate, followed by growing the graphene layers on the epitaxial layer by chemical vapor deposition, where the x is 0.7-1 and y is 0.002-0.05. An INDEPENDENT CLAIM is also included for a method for growing a graphene.