▎ 摘　　要

NOVELTY - The mask (100) has a body portion including a first surface that is in contact with a deposition substrate (SUB), and a second surface that faces the first surface. Openings are formed and penetrated through the first and second surfaces of the body portion. A carbon layer is formed on the first and second surfaces of the body portion, and includes a carbon nanotube or a graphene. A sidewall comprises a first slanted surface, a second slanted surface that faces the first slanted surface and a third slanted surface that connects the first and second slanted surfaces. USE - Deposition mask for use in a deposition apparatus (claimed) for forming patterned deposition material of a flat panel display i.e. organic light emitting display device, and a semiconductor device. ADVANTAGE - The carbon layer is formed on the first surface, the second surface and the sidewall, so that an area in which the carbon layer is arranged, can be increased, thus enhancing strength of the deposition mask and improving rate of discharge of static electricity. The carbon layer includes the carbon nanotube or the grapheme, so that the carbon layer provides low surface resistance, high electrical conductivity, high heat conductivity and high durability such that strength of the deposition mask is enhanced, and the arcing phenomenon is reduced. The mask prevents the deposition substrate from being damaged, so that the deposition substrate achieves improved durability. DETAILED DESCRIPTION - The deposition substrate is a display substrate for an organic light emitting display device. An INDEPENDENT CLAIM is also included for a deposition apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a deposition apparatus. Deposition chamber (CP) Deposition source (SP) Deposition substrate (SUB) Deposition apparatus (10) Deposition mask (100)