• 专利标题:   Adhesive composition for reticle assembly, comprises a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol and a solvent including water and alcohol.
  • 专利号:   US2022135855-A1, KR2022059170-A, CN114437651-A
  • 发明人:   LEE Y, JEONG C Y, LEE H, YOO B, KIM M J, KIM M, RYU B C, LEE H S, YOUNG J C, DING C, LI H, LIU B
  • 专利权人:   KOREA ADVANCED SCI TECHNOLOGY INST, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, KOREA ADVANCED SCI TECHNOLOGY INST, KOREA ADVANCED SCI TECHNOLOGY INST
  • 国际专利分类:   C08K003/04, C08K003/36, C08K005/05, C09J129/04, G03F001/64, C08K005/13, C08K005/5415, C09J011/00, C09J011/04, C09J011/06, G03F001/62
  • 专利详细信息:   US2022135855-A1 05 May 2022 C09J-129/04 202247 English
  • 申请详细信息:   US2022135855-A1 US516428 01 Nov 2021
  • 优先权号:   KR144447

▎ 摘  要

NOVELTY - An adhesive composition comprises a polyphenol compound including tannic acid; a polymer including polyvinyl alcohol; and a solvent including water and alcohol. USE - An adhesive composition for reticle assembly (claimed). ADVANTAGE - The adhesive composition is easily removed, is environmentally friendly and has strong adhesive strength. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for reticle assembly comprising a photomask; a stud protruding from the photomask; a pellicle adhesive layer configured to adhere the stud onto the photomask; and a pellicle fixed on the photomask by the stud, where the pellicle adhesive layer includes a polyphenol compound including tannic acid and a polymer including polyvinyl alcohol.