• 专利标题:   Method for manufacturing device for use in electronics and biomolecule detection, involves depositing second resin layer of lithography on preserving area of first lithography, without removing first resin layer.
  • 专利号:   WO2021001363-A1, FR3098344-A1, FR3098344-B1, EP3994720-A1, US2022244217-A1
  • 发明人:   BOCKELMANN U, MENSAH K
  • 专利权人:   CENT NAT RECH SCI, ECOLE SUPERIEURE PHYSIQUE CHIM IND VIL, UNIV SORBONNE, CENT NAT RECH SCI, ECOLE SUPERIEURE PHYSIQUE CHIM IND VIL, UNIV SORBONNE, ECOLE SUPERIEURE PHYSIQUE CHIM IND VIL, UNIV SORBONNE, CENT NAT RECH SCI
  • 国际专利分类:   H01L021/027, H01L029/66, H01L029/786, G01N027/00, H01L021/335, H01L029/778, G01N027/414
  • 专利详细信息:   WO2021001363-A1 07 Jan 2021 H01L-021/027 202108 Pages: 58 French
  • 申请详细信息:   WO2021001363-A1 WOEP068391 30 Jun 2020
  • 优先权号:   FR007342

▎ 摘  要

NOVELTY - The method involves depositing a first resin layer of lithography above or on a protective layer such that the protective layer is included between a conductive layer (2) and the first resin layer. The superposition of the first resin layer, the protective layer and the conductive layer are preserved a preserving area of the first lithography. A second resin layer of lithography is deposited on the preserving area of the first lithography, without removing the first resin layer. The electrodes (7) are formed in the second resin layer and in contact with the conductive layer. USE - Method for manufacturing device for use in electronics and biomolecule detection. ADVANTAGE - The method produces the device without introducing an impurity into the conductive layer. The method allows good spreading of the graphene sheet and improves its adhesion to the substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a device that comprises a substrate, a conductive layer and electrodes. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic sectional view of the device during manufacturing. Conductive layer (2) Substrate (3) Electrodes (7) Passivation layer (8) Common source (71)