▎ 摘　　要

NOVELTY - The utility model claims a diaphragm structure and MEMS microphone, the diaphragm structure comprises: sequentially first polysilicon layer laminated, at least one layer of graphene layer of a layer and a second polysilicon layer; wherein the first polysilicon layer, the graphene layer and the second polysilicon layer are provided with a corrugated structure, the first polysilicon layer, the corrugated structure sequentially the layer and graphene second polysilicon layer are laminated. The utility model can improve the sensitivity and reliability of the diaphragm structure at the same time. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a MEMS microphone.