▎ 摘　　要

NOVELTY - The sensor has a substrate having a cavity, a thin electrically conductive membrane (605) bounding at least part of the cavity, a first source trace electrically connected to the thin electrically conductive membrane, a first sensor trace operatively connected to the substrate, and a first gate trace operatively connected to the substrate. The thin electrically conductive membrane can include one or more layers of graphene. A proof mass mechanically connected to the thin electrically conductive membrane, is a metal such as copper. USE - Sensor e.g. gyrocope, accelerometer used in consumer product. Can also be used as pressure sensor in car tire pressure sensor, blood pressure sensor, biosensor and chemosensors used in medical-and health-related technologies. ADVANTAGE - Reduces device size while saving cost by the ability of the membrane-based nano-electromechanical system (NEMS) device to perform multiple functions. The sensing area of the membrane-based NEMS device is not linked with its support structure thickness, which enables the membrane-based NEMS device to minimize support stiffness without compromising capacitive sensing area. Utilizes entire area of its proof mass as active sensing area in which the majority of the proof mass of MEMS gyroscope/accelerometer devices are dead weight. Allows use of dense metals like copper or gold as proof mass. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for (1) an electrical relay; (2) an adjustable angle mirror device; (3) a variable impedance device; and (4) an operating method of sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of the membrane-based NEMS device. Middle traces (603a,603c) Upper traces (604a,604c) Thin electrically conductive membrane (605) Metal cylinder (606) NEMS device (606)