• 专利标题:   High sensitivity graphene based infrared electric adjustable sensor, has wall paved on rectangular groove for etching elliptic groove, and electrodes provided on doped silicon substrate, which is connected to direct current power supply.
  • 专利号:   CN207610988-U
  • 发明人:   LIN H, XIAO B, TONG S
  • 专利权人:   UNIV CHINA JILIANG
  • 国际专利分类:   G01N021/41
  • 专利详细信息:   CN207610988-U 13 Jul 2018 G01N-021/41 201850 Pages: 7 Chinese
  • 申请详细信息:   CN207610988-U CN21394013 26 Oct 2017
  • 优先权号:   CN21394013

▎ 摘  要

NOVELTY - The utility model claims a graphene-based mid-infrared electrically adjustable sensor with high sensitivity, comprising a doped silicon substrate (1), a SiO2 medium substrate (2), graphene (3), direct current power supply (4), an Au electrode (5a, 5b) and the elliptic groove (6), a rectangular groove (7), the graphene layer and the doped silicon substrate at least covering the test electrode. The utility model based on the sensitivity adjustable sensor in high infrared of graphene using metal-medium-metal " structure, the whole structure is simply so as to reduce the difficulty of mass production and cost; The utility model based on intermediate infrared of the graphene electrically adjustable sensor with high sensitivity to the common pollution gas has higher sensitivity and quality factor, resonant cavity to improve the performance in the detection of infrared based on graphene of the utility model has high sensitivity adjustable sensor has adjustable performance and adjustability of working frequency section, using the electrode and the external DC power source, so as to change the graphene of chemical potential to change resonant mode.