• 专利标题:   Apparatus for graphene manufacturing, has pipe member that houses material to be processed, transport mechanism that moves material to be processed in pipe member in sealed state, pump that exhausts inside of pipe member, and atmospheric gas introducing unit for introducing gas inside pipe member.
  • 专利号:   JP2021130587-A
  • 发明人:   SHIMIZU T, WATANABE J
  • 专利权人:   NAT INST ADVANCED IND SCI TECHNOLOGY, YAZAKI CORP
  • 国际专利分类:   C01B032/184
  • 专利详细信息:   JP2021130587-A 09 Sep 2021 C01B-032/184 202176 Pages: 13 Japanese
  • 申请详细信息:   JP2021130587-A JP026881 20 Feb 2020
  • 优先权号:   JP026881

▎ 摘  要

NOVELTY - The apparatus (1) includes: a pipe member (3) that houses the material to be processed (2) and is configured to be hermetically sealed; a transport mechanism (4) that moves the material to be processed in the longitudinal direction of the pipe member in a sealed state; a heater (5) that heats a component of the pipe member in the longitudinal direction; a cooler (6) provided on the front side of the heater in the moving direction of the material to be processed to cool the pipe member; a pump (7) that exhausts the inside of the sealed pipe member; and an atmospheric gas introducing unit (8) for introducing an atmospheric gas inside the sealed pipe member. The transport mechanism includes a boat member (41) on which the material to be processed is placed and a rod member (42) having a tip portion detachably configured on the boat member. The tip portion of the rod member has a hook shape and is attached to the boat member by hooking the tip portion. USE - The apparatus is used for graphene manufacturing (claimed). The graphene is used in applications such as transparent electrode films using graphene, electronic devices such as semiconductor devices, and heat conductive materials. ADVANTAGE - The apparatus is capable of easily producing graphene using a non-gas carbon source. The apparatus performs continuous production of graphene by optimizing the structure and operation of the apparatus, reduces manufacturing cost of graphene, and expands applications such as transparent electrode films using graphene, electronic devices such as semiconductor devices, and heat conductive materials. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a graphene manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows schematic diagram of the structure of the graphene manufacturing apparatus. Graphene manufacturing apparatus (1) Material to be processed (2) Pipe member (3) Transport mechanism (4) Heater (5) Cooler (6) Pump (7) Atmospheric gas introducing unit (8) Boat member (41) Rod member (42)