• 专利标题:   Manufacturing device of graphene pattern used in e.g. FET, has jig conveying unit that is provided for transferring solute pattern above pattern formation jig with evaporation-induced self assembly.
  • 专利号:   KR2014006579-A, KR1376978-B1
  • 发明人:   YANG W S, KIM H K, KIM T Y, KWON S W, KIM Y N, PARK W K, JANG A R, SHIN H S, YOON D H, SUH K S
  • 专利权人:   INTELLECTUAL DISCOVERY CO LTD
  • 国际专利分类:   H01L021/02, H01L021/027
  • 专利详细信息:   KR2014006579-A 16 Jan 2014 H01L-021/027 201417 Pages: 12
  • 申请详细信息:   KR2014006579-A KR073918 06 Jul 2012
  • 优先权号:   KR073918

▎ 摘  要

NOVELTY - The device has a pattern formation jig that is arranged on a substrate (10) formed with a graphene (G). A solution supply unit is provided for feed solution (STN) on the substrate. A jig conveying unit is provided for transferring the solute pattern above pattern formation jig with evaporation-induced self assembly (EISA). A pattern shape unit is provided for forming the graphene pattern. The soluble pattern contains polymethyl methacrylate, metal particle and inorganic material particle. The substrate is made of polyethylene terephthalate and silicon dioxide/silicon. USE - Manufacturing device of graphene pattern used in electronic device such as transparent conductive film, sensor and FET. ADVANTAGE - The graphene pattern can be manufactured effectively without including the lithographic process. The manufacturing cost of the graphene pattern can be reduced. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the manufacturing device of graphene pattern. Substrate (10) Cylindrical roller (110) Graphene (G) Polymethyl methacrylate pattern (PP) Solution (STN)