• 专利标题:   Resistor-type memory preparation method, involves performing industrial reaction ion etching oxidization and remote plasma oxidization treatment to graphene layer to form graphene oxide layer, and forming upper electrode.
  • 专利号:   CN101901869-A
  • 发明人:   ZHOU P, ZHANG W, WU D, SUN Q
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   H01L045/00
  • 专利详细信息:   CN101901869-A 01 Dec 2010 H01L-045/00 201115 Pages: 9 Chinese
  • 申请详细信息:   CN101901869-A CN10231309 20 Jul 2010
  • 优先权号:   CN10231309

▎ 摘  要

NOVELTY - The method involves forming a lower electrode, and forming patterns on the lower electrode to form a graphene layer. Industrial reaction ion etching oxidization and remote plasma oxidization treatment are performed to the graphene layer to form a graphene oxide layer and an upper electrode. The formation of the graphene layer involves chemical vapor deposition. Methane gas and argon gas are input, and a material provided is heated to 950-1100 degrees centigrade and reduced to room temperature when performing the chemical vapor deposition. USE - Preparation method for resistor-type memory. ADVANTAGE - The method is compatible to a preparation technique of a semiconductor plane, so that the method meets the large-scale industrial production demand and achieves low preparation cost. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart of a resistor-type memory preparation method. '(Drawing includes non-English language text)'