• 专利标题:   Method for eliminating the adsorbates on the surface of graphene, involves removing the residue of the graphene from the surface using rapid thermal processing process in five to thirty minutes, while removing the imprint of graphene.
  • 专利号:   KR1443853-B1
  • 发明人:   CHOI S H, KIM S, JANG C W, SHIN D H
  • 专利权人:   UNIV KYUNGHEE IND COOP
  • 国际专利分类:   H01L021/302, H01L021/324
  • 专利详细信息:   KR1443853-B1 23 Sep 2014 H01L-021/302 201476 Pages: 14
  • 申请详细信息:   KR1443853-B1 KR045024 23 Apr 2013
  • 优先权号:   KR045024

▎ 摘  要

NOVELTY - The method involves transferring the graphene on the substrate, while making the substrate using the photolithographic process. The residue of the graphene is removed from the surface using the rapid thermal processing process in five minutes to thirty minutes. The imprint of the graphene is removed using the mechanical exfoliation process and chemistry deposition process. USE - Method for eliminating the adsorbates on the surface of the graphene. ADVANTAGE - The residue of the graphene is removed from the surface using the rapid thermal processing process in five minutes to thirty minutes, and thus ensures the efficiency in eliminating the adsorbates on the surface of the graphene, and hence effectively removes the impurity and deformity from the graphene surface, while reducing the thermal processing about the adsorbates eliminating method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of an adsorbate eliminating method. (Drawing includes non-English language text).