• 专利标题:   Graphene electronic device e.g. FET has gate oxide layer that is formed to cover graphene channel layer between source and drain electrodes, and gate electrode that is provided on channel layer between source and drain electrodes.
  • 专利号:   US2014021445-A1, US8884345-B2
  • 发明人:   HEO J, CHUNG H, SEO S, LEE S, YANG H
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L029/66, H01L029/786, H01L021/78, H01L029/16, H01L029/778, H01L029/78
  • 专利详细信息:   US2014021445-A1 23 Jan 2014 H01L-029/786 201410 Pages: 13 English
  • 申请详细信息:   US2014021445-A1 US035305 24 Sep 2013
  • 优先权号:   KR032192

▎ 摘  要

NOVELTY - The graphene electronic device (200) has a pair of metals (222,224) that is provided on a substrate (210). The metals are separated from each other. A graphene channel layer (230) is extended between and on the metals. A source electrode (242) and a drain electrode (244) are provided on both edges of the graphene channel layer. A gate oxide layer (250) is formed to cover the graphene channel layer between the source electrode and the drain electrode. A gate electrode (260) is provided on the graphene channel layer between the source electrode and the drain electrode. USE - Graphene electronic device such as FET. ADVANTAGE - Since the metal protection layer is formed on graphene layer when the metal catalyst layer formed under the graphene layer is wet etched, the direct contact between the photoresist pattern and the graphene layer may be prevented or impeded. Thus the damage to graphene by the photoresist remaining when the photoresist pattern is removed can be prevented or impeded. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of fabricating graphene electronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the structure of graphene electronic device. Graphene electronic device (200) Substrate (210) Metals (222,224) Graphene channel layer (230) Source electrode (242) Drain electrode (244) Gate oxide layer (250) Gate electrode (260)