1. 平台首页
  2. 国际专利信息
  • 专利标题:   Apparatus for separating carbon-containing structures in form of nanotubes or graphene, has plate-shaped component that is arranged in process chamber housing and inserted in retaining recess formed in wall of process chamber housing.
  • 专利号:   DE102014104011-A1, WO2015144558-A1, TW201600632-A, KR2016135343-A, EP3129524-A1, CN106458592-A, US2017107613-A1, JP2017520675-W, US10260147-B2
  • 发明人:   RIPPINGTON D E, JOUVRAY A, RUPESINGHE N L, TEO K, TEO K B K, RUPESINGHE N
  • 专利权人:   AIXTRON SE, AIXTRON SE
  • 国际专利分类:   C23C016/455, C23C016/458, C23C016/46, C01B031/02, C01B031/04, C23C016/26, C01B032/05, C01B032/182, C01B032/152, C01B032/158, C23C016/44, C01B032/16, C01B032/186
  • 专利详细信息:   DE102014104011-A1 24 Sep 2015 C23C-016/458 201566 Pages: 17 German
  • 申请详细信息:   DE102014104011-A1 DE10104011 24 Mar 2014
  • 优先权号:   DE10104011

▎ 摘　　要

NOVELTY - The apparatus has substrate supports arranged in process chamber housing. The gas outlet openings of gas inlet element are arranged in process chamber housing for feeding the process gas toward the substrate (6). The process chamber housing has two opposite walls, which includes retaining recesses. The plate-shaped component is arranged in process chamber housing and inserted in retaining recess. USE - Apparatus for separating carbon-containing structures in form of nanotubes or graphene on substrate. ADVANTAGE - The separation of carbon-containing structures in form of nanotubes or graphene on substrate is achieved. DESCRIPTION OF DRAWING(S) - The drawing shows an exploded view of the substrate support. Substrate (6) Peripheral edge (11) Projection (12) Screw (14) Hole (15)