▎ 摘 要
NOVELTY - The apparatus has substrate supports arranged in process chamber housing. The gas outlet openings of gas inlet element are arranged in process chamber housing for feeding the process gas toward the substrate (6). The process chamber housing has two opposite walls, which includes retaining recesses. The plate-shaped component is arranged in process chamber housing and inserted in retaining recess. USE - Apparatus for separating carbon-containing structures in form of nanotubes or graphene on substrate. ADVANTAGE - The separation of carbon-containing structures in form of nanotubes or graphene on substrate is achieved. DESCRIPTION OF DRAWING(S) - The drawing shows an exploded view of the substrate support. Substrate (6) Peripheral edge (11) Projection (12) Screw (14) Hole (15)