▎ 摘 要
NOVELTY - The graphene inspection apparatus (10) comprises a data acquisition unit (120) for acquiring heat distribution data of graphene (G), in which the current is applied. A detection unit (130) is provided for detecting the deformity occurrence of the graphene based on heat distribution data of the graphene. A receiving unit (131) is provided for receiving heat distribution data of the graphene from the data acquisition unit. A determining unit (132) determines the deformity occurrence of the graphene. The data acquisition unit measures the thermal radiation generated in the graphene. USE - Graphene inspection apparatus for use in graphene check system (Claimed). ADVANTAGE - The graphene inspection apparatus comprises a data acquisition unit for acquiring heat distribution data of graphene, in which the current is applied, and thus enables reducing the deformity about the graphene to the simple configuration in the fast time, and also improving the efficiency of the graphene quality inspection of the massively produced large area. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a graphene check system comprises transfer apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram of a graphene inspection apparatus. (Drawing includes non-English language text). Graphene inspection apparatus (10) Data acquisition unit (120) Detection unit (130) Receiving unit (131) Determining unit (132) Graphene (G)