• 专利标题:   Manufacture of graphene used for e.g. graphene conducting wire, for semiconductor device e.g. memory, involves controlling electrical characteristics by doping nitrogen to graphene.
  • 专利号:   KR2012127070-A
  • 发明人:   LEE S S, JUNG M W, PARK B K, JEONG S J, LEE Y K, CHUNG T M, KIM C G, AN K S, SHIN Y S, JUNG D
  • 专利权人:   KOREA RES INST CHEM TECHNOLOGY
  • 国际专利分类:   C01B031/02, C23C016/26, H01B001/04, H01L021/20
  • 专利详细信息:   KR2012127070-A 21 Nov 2012 C01B-031/02 201342 Pages: 14
  • 申请详细信息:   KR2012127070-A KR045303 13 May 2011
  • 优先权号:   KR045303

▎ 摘  要

NOVELTY - Manufacture of graphene involves controlling electrical characteristics by doping nitrogen to graphene. USE - Manufacture of graphene used for graphene conducting wire, graphene channel layer and graphene charge trapping layer for semiconductor device e.g. memory, transistor, sensor element, radiant heat element and heat-generation element (all claimed). ADVANTAGE - The method efficiently and economically provides graphene. The semiconductor device using the graphene has high electrical characteristics and chipping resistance. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) semiconductor device, which comprises substrate, N-doped graphene, and electrode layer formed on the substrate; and (2) fabrication of semiconductor device.