• 专利标题:   Semiconductor device e.g. photoelectric conversion device, has conductive film for containing particle as junction and graphene extending in network from junction, where graphene in conductive film is separated from insulation film by gap.
  • 专利号:   US2015194386-A1, US9117823-B2
  • 发明人:   YAMAZAKI Y, WADA M, SAITO T, SAKAI T
  • 专利权人:   TOSHIBA KK
  • 国际专利分类:   H01L023/522, H01L023/528, H01L023/532
  • 专利详细信息:   US2015194386-A1 09 Jul 2015 H01L-023/532 201548 Pages: 11 English
  • 申请详细信息:   US2015194386-A1 US663523 20 Mar 2015
  • 优先权号:   JP070004

▎ 摘  要

NOVELTY - The device (50) has an insulation film (52) formed on a substrate. A conductive film is formed on the insulation film and contains a fine catalytic metal particle (55) as a junction and graphene (56A, 56B) extending in a network form from the junction. The graphene in the conductive film is separated from the insulation film by a gap. The fine catalytic metal particle is prepared from a metal film formed on the insulation film by plasma treatment. The conductive film is used in a channel region and as a transparent electrode. USE - Semiconductor device such as multi-layered structure device i.e. LSI, and photoelectric conversion device. ADVANTAGE - The graphene can be prevented from being adversely affected by external factors due to small percentage of the graphene contained in a region. The device has high mobility when the graphene is used as the channel region for carrying current in a transistor. The transparent electrode has high current property and high light transmission when patterns of catalytic metal portions and the bonding portions are optimized. The transparent electrode can be used in a flexible display due to the graphene including high mechanical strength and high bending property. DETAILED DESCRIPTION - The embedded portion contains metal or compound selected from titanium (Ti), titanium nitride (TiN) and tantalum nitride (TaN). DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a semiconductor device. Semiconductor device (50) Photoelectric conversion layer (51) Insulation film (52) Fine catalytic metal particle (55) Graphene (56A, 56B)