• 专利标题:   Non-destructive inspecting graphene, comprises applying a reactive gas on a surface of a metal substrate on which graphene is synthesized, and detecting oxidized region of the metal substrate by the reactive gas.
  • 专利号:   KR1768366-B1
  • 发明人:   KIM H K, KIM Y N
  • 专利权人:   KOREA ELECTRONICS TECHNOLOGY INST
  • 国际专利分类:   C01B031/04, G01N021/64, G01N027/24, G01N027/30
  • 专利详细信息:   KR1768366-B1 17 Aug 2017 G01N-027/24 201765 Pages: 11
  • 申请详细信息:   KR1768366-B1 KR039007 31 Mar 2016
  • 优先权号:   KR039007

▎ 摘  要

NOVELTY - Non-destructive inspecting graphene, comprises (a) applying a reactive gas (130) on a surface of a metal substrate on which graphene (120) is synthesized, and (b) detecting oxidized region of the metal substrate (110) by the reactive gas. The step (a) is carried out during cooling the metal substrate. USE - The method is useful for non-destructive inspecting graphene (claimed). ADVANTAGE - The method performs inspection without damaging the graphene, shortens processing time, improves productivity and quality of graphene, and is economical. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for graphene non-destructive inspecting device comprising a graphene synthesis unit for synthesizing graphene on a metal substrate, a cooling unit for cooling the metal substrate on which the graphene is synthesized, and graphene defect inspection portion for inspecting nondestructive of graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the non-destructive inspecting method of graphene. Metal substrate (110) Graphene (120) Reactive gas (130)