▎ 摘　　要

NOVELTY - Pellicle film comprises layers laminated to each other and/or layers provided with one or more openings having a width or diameter in the range of 10-500 nm. USE - The pellicle film is used for preventing dust from adhering to the photomask or reticle. ADVANTAGE - The pellicle film has a low absorption rate for extreme UV lithography, has excellent heat resistance, does not get easily damaged and has excellent in-plane uniformity and performance such as light transmittance and adsorptivity. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a pellicle membrane having layers laminated on each other and having one or more openings in two or more of the layers; (2) a pellicle comprising the pellicle film comprising pellicle film and frame supporting the pellicle film; (3) a film comprising graphene sheets laminated on each other and having one or more openings in one or more of the graphene sheets; and (4) a method for producing a graphene sheet, which comprises forming a mask layer that covers a portion of the metal layer on the metal layer, and generating graphene in a portion of the metal layer that is not covered by the mask layer.