• 专利标题:   Method for forming graphene-metal Ohmic contact region, involves performing electronic beam evaporation or sputtering process on surface of sample by deposition of metals and peeling off surface of sample and drain of photoresist.
  • 专利号:   CN102623310-A
  • 发明人:   CHEN J, GUO J, JIN Z, MA P, PAN H, PENG S, WANG X
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/04, H01L021/28
  • 专利详细信息:   CN102623310-A 01 Aug 2012 H01L-021/04 201269 Pages: 9 Chinese
  • 申请详细信息:   CN102623310-A CN10093144 31 Mar 2012
  • 优先权号:   CN10093144

▎ 摘  要

NOVELTY - The method involves preparing (1) graphene material on the substrate. The photoresist is spin coated (2) on the graphene material. The photoresist on the graphene material is etched (3) by supplying solution to form photo-resist of source-drain pattern. The graphene material is etched (4) from the source and drain regions. The electronic beam evaporation or sputtering process is performed (5) on the surface of the sample by deposition of metals. The surface of the sample source and drain of photoresist is peeled (6) off to form graphene-metal Ohmic contact region. USE - Method for forming graphene-metal Ohmic contact region. ADVANTAGE - The metal-graphene Ohmic contact can be formed efficiently. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart illustrating the process for forming graphene-metal Ohmic contact region. (Drawing includes non-English language text) Step for preparing layers of graphene material on substrate (1) Step for spin coating photoresist on graphene material layers (2) Step for etching photoresist on the graphene material layer (3) Step for etching graphene material to from source and drain regions (4) Step for performing electronic beam evaporation or sputtering on surface of sample (5) Step for peeling off surface of sample source and drain of photoresist (6)