▎ 摘　　要

NOVELTY - Nanocomposite detector structure comprises a silicon nitride cantilever beam, a layer of vanadium oxide or amorphous silicon disposed atop the silicon nitride cantilever beam, a carbon nanotube (CNT) film disposed atop the layer of vanadium oxide or amorphous silicon, a layer of silicon nitride disposed atop the CNT film, and a layer of graphene disposed atop the layer of silicon nitride. USE - Nanocomposite detector structure for sensing electromagnetic radiation for emitters, modulators, repeaters, waveguides or fibers, reflectors, resonators, detectors, and IR Focal plane arrays. ADVANTAGE - The microbolometric structure has increased sensitivity and smaller pixel size below 25m, and good fabrication compatibility with complementary metal-oxide semiconductor (CMOS) processing which has resulted in use of wafer processing and thus lower costs by increasing yields and realizing economies of scale of wafers level integration and processing. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic overall structure of a microbolometer. 100Infrared radiation 101Readout circuit 103Metal 104Detector 105Support legs